A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application.

Micromachines (Basel)

The School of Engineering, Institute for Integrated Micro and Nano Systems, University of Edinburgh, Edinburgh EH9 3FF, UK.

Published: April 2023


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Article Abstract

A graphene/poly(methyl methacrylate) (PMMA) closed cavity resonator with a resonant frequency at around 160 kHz has been fabricated. A six-layer graphene structure with a 450 nm PMMA laminated layer has been dry-transferred onto the closed cavity with an air gap of 105 μm. The resonator has been actuated in an atmosphere and at room temperature by mechanical, electrostatic and electro-thermal methods. The (1,1) mode has been observed to dominate the resonance, which suggests that the graphene/PMMA membrane has been perfectly clamped and seals the closed cavity. The degree of linearity of the membrane's displacement versus the actuation signal has been determined. The resonant frequency has been observed to be tuned to around 4% by applying an AC voltage through the membrane. The strain has been estimated to be around 0.08%. This research puts forward a graphene-based sensor design for acoustic sensing.

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http://www.ncbi.nlm.nih.gov/pmc/articles/PMC10143713PMC
http://dx.doi.org/10.3390/mi14040810DOI Listing

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