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Article Abstract
Various mechanisms initiated by wildfires thinned the stratospheric ozone layer.
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| http://dx.doi.org/10.1126/science.add2056 | DOI Listing |
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Ozone (O) is a primary pollutant affecting air quality in China, whose formation rate was non-linearly based on volatile organic compounds (VOCs) and nitrogen oxides (NOx). A comprehensive understanding of the key drivers governing O formation and its sensitivity to precursor variations presents a persistent research challenge, stemming from the complex interplay of underlying photochemistry, meteorology, and topography. To address this knowledge gap, we conducted synchronous measurements of O and its precursors at both an urban (JPU) and a mountain (LM) site in a typical city in eastern China, enabling concurrent evaluation of O formation sensitivity and diagnostic analysis of its underlying mechanisms.
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Center for Water and Ecology, State Key Laboratory of Regional Environment and Sustainability, School of Environment, Tsinghua University, Beijing 100084, China. Electronic address:
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School of Electrical and Electronic Engineering, Yonsei University, 50 Yonsei-Ro, Seodaemun-Gu, Seoul 03722, Republic of Korea.
Atomic layer deposition (ALD) of tin silicon oxide was performed via an ALD supercycle on an amorphous carbon (a-C) layer, which serves as the mandrel in self-aligned double patterning (SADP) techniques. This approach addresses limitations of conventional ALD SiO2 processes using ozone (O3) as the oxidant, which can lead to degradation of a-C mandrel or collapse of the SiO2 spacer itself under aggressive scaling. In this study, tetrakis(dimethylamino)tin (TDMASn) and bis-diethylaminosilane (BDEAS) were used as Sn and Si precursors, respectively, with H2O as the oxidant to avoid damage to the a-C layer.
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