Three-level nanogrooves by vibration-assisted fly-cutting for diffraction regulation and array output.

Integrating geometric and diffractive optics functions is urgently needed to develop compact equipment for integrating diffraction manipulation and arrayed outputs. In this Letter, a superimposed three-level-grooved surface is proposed to manipulate the diffraction of visible light and provide an array output. Structure design, vibration-assisted fly-cutting, finite-difference time-domain calculations, and diffraction tests are conducted to fabricate the three-level grooves and explore the diffraction mechanism. Nanogrooves with a period close to the middle wavelength of the spectrum primarily enhances the diffraction at low diffraction orders and angles because of resonance. Optical tests prove that these superimposed three-level nanogrooves have a large bandwidth when providing the array output and serving to control and transmit diffracted light. They also show stronger performance for manipulating low diffraction orders.