A High-Sensitivity Resonant Magnetic Sensor Based on Graphene Nanomechanical Resonator.

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Shanxi Province Key Laboratory of Quantum Sensing and Precision Measurement, North University of China, Taiyuan 030051, China.

Published: April 2022


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Article Abstract

This paper presents a novel resonant magnetic sensor consisting of a graphene nanomechanical oscillator and magnetostrictive stress coupling structure, using Si/SiO substrate and Fe-Ga alloy, respectively. In this device, the deformation of the Fe-Ga alloy resulting from the external magnetic field changed the surface tension of the graphene, resulting in a significant change in the resonance frequency of graphene. Using the finite element analysis, it could be found that the response of the resonance frequency revealed a good linear relationship with the external magnetic field (along the -axis) in the range of the 1 to 1.6 mT. By optimizing the sizes of each component of the magnetic sensor, such as the thickness of the Si/SiO substrate and the Fe-Ga alloy, and the length of the graphene, the sensitivity could even reach 834 kHz/mT, which is three orders of magnitude higher than conventional resonant magnetic devices. This provides a new method for highly sensitive and miniaturized magnetic sensors.

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http://www.ncbi.nlm.nih.gov/pmc/articles/PMC9032286PMC
http://dx.doi.org/10.3390/mi13040628DOI Listing

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