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This paper reports on the evaluation of the impact of introducing interlayers and postmetallization annealing on the graphene/p-GaN ohmic contact formation and performance of associated devices. Current-voltage characteristics of the graphene/p-GaN contacts with ultrathin Au, Ni, and NiO(x) interlayers were studied using transmission line model with circular contact geometry. Direct graphene/p-GaN interface was identified to be highly rectifying and postmetallization annealing improved the contact characteristics as a result of improved adhesion between the graphene and the p-GaN. Ohmic contact formation was realized when interlayer is introduced between the graphene and p-GaN followed by postmetallization annealing. Temperature-dependent I-V measurements revealed that the current transport was modified from thermionic field emission for the direct graphene/p-GaN contact to tunneling for the graphene/metal/p-GaN contacts. The tunneling mechanism results from the interfacial reactions that occur between the metal and p-GaN during the postmetallization annealing. InGaN/GaN light-emitting diodes with NiO(x)/graphene current spreading electrode offered a forward voltage of 3.16 V comparable to that of its Ni/Au counterpart, but ended up with relatively low light output power. X-ray photoelectron spectroscopy provided evidence for the occurrence of phase transformation in the graphene-encased NiO(x) during the postmetallization annealing. The observed low light output is therefore correlated to the phase change induced transmittance loss in the NiO(x)/graphene electrode. These findings provide new insights into the behavior of different interlayers under processing conditions that will be useful for the future development of opto-electronic devices with graphene-based electrodes.
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http://dx.doi.org/10.1021/am3026079 | DOI Listing |
Sci Rep
May 2025
Department of Electrical Engineering, Pohang University of Science and Technology (POSTECH), 77 Cheongam-Ro, Nam-Gu, Pohang, Gyeongbuk, 37673, Republic of Korea.
Hafnium oxide-based ferroelectrics, particularly zirconium-doped HfO (HZO), have demonstrated excellent compatibility with CMOS fabrication processes. However, the impact of post-metallization annealing (PMA)-a key step in optimizing device performance-on CMOS and FeFET co-integrated devices has yet to be fully explored. This study investigates the effects of PMA under N and H ambients on the electrical properties of pMOSFET and nFeFET devices monolithically co-integrated on an 8-inch wafer.
View Article and Find Full Text PDFNanomaterials (Basel)
February 2023
Department of Electrical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea.
ACS Appl Mater Interfaces
October 2020
Department of Materials Science and Engineering, University of Michigan, Ann Arbor, Michigan 48109-2136, United States.
Stable ohmic contacts are critical to enable efficient operation of high-voltage electronic devices using ultrawide bandgap semiconductors. Here we perform, for the first time, thermally accelerated aging of Ti/Au ohmic interfaces to (010) β-GaO. We find that a heavily doped semiconductor, doped n-type by Si-ion implantation, treated with reactive ion etch (RIE), results in a low specific contact resistance of ∼10 Ω cm that is stable upon accelerated thermal aging at 300 °C for 108 h.
View Article and Find Full Text PDFACS Appl Mater Interfaces
July 2018
Department of Electrical and Electronic Engineering , Southern University of Science and Technology, Shenzhen 518055 , P. R. China.
Sci Rep
August 2017
School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon, 16419, Republic of Korea.