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Article Abstract
The detection of volatile organic compounds (VOCs) in the gas phase by mass-sensitive disk microresonators is reported. The disk resonators were fabricated using a CMOS-compatible silicon micromachining process and subsequently placed in an amplifying feedback loop to sustain oscillation. Sensing of benzene, toluene, and xylene was conducted after applying controlled coatings of an analyte-absorbing polymer. An analytical model of the resonator's chemical sensing performance was developed and verified by the experimental data. Limits of detection for the analytes tested were obtained, modeled, and compared to values obtained from other mass-sensitive resonant gas sensors.
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Article Synopsis
- Optical microresonators with low quality factor can be easily excited by freely propagating light, while those with high quality factor face challenges in this area.
- Researchers developed a model showing that the stored energy in a resonator is linked to its quality factor and directivity, leading to the design of efficient microdisk resonators with specific features.
- Experimental results confirm the effectiveness of these microdisks, suggesting their potential uses in sensing, improving light emission, and as micro-laser cavities due to their compact size and ease of excitation.