The deposition and wet etching of Mg-doped ZnO films and their applications for solidly mounted resonators.

In this report, a solidly mounted resonator (SMR), consisting of an Au electrode, Mg-doped ZnO (Mg Zn O) piezoelectric film and Bragg acoustic reflector, was fabricated on a Si substrate by radio frequency (RF) magnetron sputtering. As a key processing step for the SMR, Mg Zn O films with high -axis orientation were fabricated and the crystalline structure, surface morphology and roughness of the films were investigated. The surface morphology, optical transmittance and shape control of Mg Zn O films were investigated by the chemical wet-etching method with various etchants.

Solidly mounted resonator sensor for biomolecule detections.

We report the fabrication of a solidly mounted resonator (SMR) that can also function as a sensor for biological molecules. The SMR, consisting of a Au electrode, aluminum nitride (AlN) piezoelectric thin film and Bragg acoustic reflector, was fabricated on a Si substrate by radio frequency (RF) magnetron sputtering. The Bragg acoustic reflector, made entirely of metal, has small internal stress and good heat conduction.