1 results match your criteria: "National Institute of Advanced Industrial Science and Technology AIST Tsukuba Central 2[Affiliation]"
SPM system for semiconductor device applications.
Microscopy (Oxf)
November 2014
National Institute of Advanced Industrial Science and Technology AIST Tsukuba Central 2, 1-1-1 Umezono,Tsukuba-shi, Ibaraki-ken, 305-8568, Japan.
Recently, scanning probe microscopy (SPM) is widely used for development of semiconductor devices. One of the important functions of SPM is high resolution topography, such as shape of the nanoscale devices and surface roughness of the films. Additionally, SPM can measure the electronic structure of the nanoscale-devices.
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