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Article Abstract
We present an angle-resolved channeled spectroscopic micro-ellipsometry (ACSE) system operating in a near-normal-incidence configuration with a line-scan spectrometer. The hardware covers the visible spectral range from 480 to 680 nm and provides incidence angles from 0° to 60°. By analyzing the spectral interference envelope, we accurately separate and extract the low-frequency (DC) and high-frequency (AC) components of the interferometric signal, corresponding to the baseline intensity and modulation, respectively. Moreover, we employ a Hilbert transform to analyze and calibrate spectral amplitude and phase errors, thereby improving the precision of the retrieved ellipsometric parameters. To validate the proposed method, we measured thin films deposited on a Si wafer with thicknesses spanning from 10 to 1500 nm and successfully determined both thickness and refractive index values, which were confirmed by comparing them with those obtained using a commercial ellipsometer.
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We present an angle-resolved channeled spectroscopic micro-ellipsometry (ACSE) system operating in a near-normal-incidence configuration with a line-scan spectrometer. The hardware covers the visible spectral range from 480 to 680 nm and provides incidence angles from 0° to 60°. By analyzing the spectral interference envelope, we accurately separate and extract the low-frequency (DC) and high-frequency (AC) components of the interferometric signal, corresponding to the baseline intensity and modulation, respectively.
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