Design, fabrication, and calibration of a micromachined thermocouple for biological applications in temperature monitoring.

This paper presents a microneedle thermocouple probe designed for temperature measurements in biological samples, addressing a critical need in the field of biology. Fabricated on a Silicon-On-Insulator (SOI) wafer, the probe features a doped silicon (Si)/chrome (Cr)/gold (Au) junction, providing a high Seebeck coefficient, rapid response times, and excellent temperature resolution. The microfabrication process produces a microneedle with a triangular sensing junction. Finite Element Analysis (FEA) was employed to evaluate the thermal time constant and structural integrity in tissue, supporting the probe's suitability for biological applications. Experimental validation included temperature measurements in ex-vivo tissue and live Xenopus laevis oocytes. Notably, intracellular thermogenesis was detected by increasing extracellular potassium concentration to depolarize the oocyte membrane, resulting in a measurable temperature rise. These findings highlight the probe's potential as a robust tool for monitoring temperature variations in biological systems.