New Heteroleptic Cobalt Precursors for Deposition of Cobalt-Based Thin Films.

A new series of heteroleptic complexes of cobalt were synthesized using aminoalkoxide and β-diketonate ligands. The complexes, [Co(dmamp)(acac)] (), [Co(dmamp)(tfac)] (), [Co(dmamp)(hfac)] (), [Co(dmamp)(tmhd)] (), and [Co(dmamb)(tmhd)] (), were prepared by two-step substitution reactions and studied using Fourier transform infrared spectroscopy, mass spectrometry, elemental analysis, and thermogravimetric analysis (TGA). Complexes - displayed dimeric molecular structures for all of the complexes with cobalt metal centers interconnected by μ-O bonding by the alkoxy oxygen atom. TGA and a thermal study of the complexes displayed high volatilities and stabilities for complexes and , with sublimation temperatures of 120 °C/0.5 Torr and 130 °C/0.5 Torr, respectively.