Numerical and experimental study of actuator performance on piezoelectric microelectromechanical inkjet print head.

We have investigated the actuator performance of a piezoelectrically actuated inkjet print head via the numerical and experimental analysis. The actuator consisting of multi-layer membranes, such as piezoelectric, elastic and other buffer layers, and ink chamber was fabricated by MEMS processing. The maximum displacement of the actuator membrane obtained in the experiment is explained by numerical analysis. A simulation of the actuator performance with fluidic damping shows that the resonant frequency of the membrane in liquid is reduced from its resonant frequency in air by a factor of three, which was also verified in the experiment. These simulation and experimental studies demonstrate how much "dynamic force," in terms of a membrane's maximum displacement, maximum force and driving frequency, can be produced by an actuator membrane interacting with fluid.